Synthesis of Carbon Nanotubes by Plasma Enhanced Hot-Filament C
نویسندگان
چکیده
A mixture of acetylene, hydrogen and ammonia C2H2/H2/NH3 is used to produce carbon nanotubes (CNTs) by a plasma-enhanced catalytic chemical vapor deposition process with hot-filaments assistance (PE HF CCVD). The investigation of gas phase and surface chemistry is performed by CHEMKINTM software. The concentration of gas phase species on the substrate is presented. Based on this study the role of various hydrocarbon and hydrogen species in the growth of carbon nanotubes is described. The role of hot-filaments in CNTs formation is presented. The synthesized nanotubes were observed using scanning electron microscopy (SEM) and transmission electron microscopy (TEM).
منابع مشابه
An Investigation of the Plasma Composition in Plasma-enhanced Hot Filament Catalytic Chemical Vapor Deposition of Carbon Nanotubes
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